Inventor · Cupertino, CA, US

Jalal Ashjaee

24Patents
7h-index
18Co-inventors
66Inventor score

Filing activity: Mar 28, 1983 → Mar 25, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6482307B2 Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing Electricity 78 Expired
US4507078A Wafer handling apparatus and method Emerging Cross-Sectional Technologies 35 Expired
US6988932B2 Apparatus of sealing wafer backside for full-face processing Electricity 13 Expired
US6468139B1 Polishing apparatus and method with a refreshing polishing belt and loadable housing Performing Operations; Transporting 11 Expired
US6939206B2 Method and apparatus of sealing wafer backside for full-face electrochemical plating Electricity 10 Expired
US6852208B2 Method and apparatus for full surface electrotreating of a wafer Electricity 9 Expired
US6464571B2 Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein Performing Operations; Transporting 8 Expired
US7316602B2 Constant low force wafer carrier for electrochemical mechanical processing and chemical mechanical polishing Chemistry; Metallurgy 5 Expired
US6604988B2 Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein Performing Operations; Transporting 5 Expired
US8016007B2 Method and apparatus for stringing thin film solar cells Emerging Cross-Sectional Technologies 4 Active
US6855037B2 Method of sealing wafer backside for full-face electrochemical plating Electricity 4 Expired
US6736929B2 Distributed control system for semiconductor manufacturing equipment Emerging Cross-Sectional Technologies 3 Expired
US7923281B2 Roll-to-roll processing method and tools for electroless deposition of thin layers Emerging Cross-Sectional Technologies 3 Active
US6777338B2 Edge and bevel cleaning process and system Electricity 3 Expired
US7476304B2 Apparatus for processing surface of workpiece with small electrodes and surface contacts Electricity 2 Active
US6932679B2 Apparatus and method for loading a wafer in polishing system Performing Operations; Transporting 2 Expired
US6953392B2 Integrated system for processing semiconductor wafers Electricity 1 Expired
US11699622B2 Methods and apparatus for test pattern forming and film property measurement Electricity 1 Active
US7059944B2 Integrated system for processing semiconductor wafers Emerging Cross-Sectional Technologies 1 Expired
US11289386B2 Methods and apparatus for test pattern forming and film property measurement Electricity 0 Active
US8497152B2 Roll-to-roll processing method and tools for electroless deposition of thin layers Emerging Cross-Sectional Technologies 0 Active
US10790203B2 Methods and systems for material property profiling of thin films Electricity 0 Active
US7427337B2 System for electropolishing and electrochemical mechanical polishing Electricity 0 Expired
US7122473B2 Edge and bevel cleaning process and system Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.