Pulse power system for extreme ultraviolet and x-ray sources
US6744060B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 10, 2002 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Jun 13, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/06
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention provides a pulse power system for extreme ultraviolet and x-ray light sources. The pulse power system produces electrical pulses of at least 12 J at pulse repetition rates of at least 2000 Hz. The system is extremely reliable and has design lifetime substantially in excess of 10 billion pulses. The system includes a charging capacitor bank, a fast charger for charging the charging capacitor bank in time periods of less than 0.5 seconds. A voltage control circuit is provided for controlling the charging voltage capacitor to within less than 0.5 percent of desired values. The system includes a magnetic compression circuit for creating, compressing in duration and amplifying voltage pulses. A trigger circuit discharges the charging capacitor bank into the pulse compression circuit so as to produce EUV or x-ray light pulses with a timing accuracy of less than 10 ns. In a preferred embodiment a pulse transformer with at least two one-turn primary windings and a single one turn secondary winding is included in the pulse compression circuit and increases the pulse voltage by at least a factor of 3.The pulse power system described herein is useful for providing high e…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.