Antenna for producing uniform process rates
US6744213B2 · kind B2 · utility
24Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2003 |
| Grant date | Jun 1, 2004 |
| Priority date | — |
| Expiry date | Feb 24, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01Q7/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An antenna arrangement for generating an electric field inside a process chamber through a window. Generally, the antenna arrangement comprises an outer loop, comprising a first outer loop turn disposed around an antenna axis, an inner loop, comprising a first inner loop turn disposed around the antenna axis, wherein the inner loop is closer to the antenna axis than the outer loop is to the antenna axis in each azimuthal direction, and a radial connector radially electrically connecting the outer loop to the inner loop, wherein the radial connector is placed a large distance from the window.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.