(Meth)acrylates having lactone structure, polymers, photoresist compositions and patterning process
US6746818B2 · kind B2 · utility
24Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 13, 2002 |
| Grant date | Jun 8, 2004 |
| Priority date | — |
| Expiry date | Jun 13, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/106
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
(Meth)acrylate compounds having a norbornane, bicyclo[2.2.2]octane, 7-oxanorbornane or cyclohexane ring structure and a &ggr;-butyrolactone ring structure connected together by a suitable linker are novel and useful in forming polymers having high transparency, especially at the exposure wavelength of an excimer laser.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.