CMP belt stretch compensation apparatus and methods for using the same
US6749491B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 26, 2001 |
| Grant date | Jun 15, 2004 |
| Priority date | — |
| Expiry date | Jan 12, 2022 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B21/20
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for reducing non-uniform stretch of a belt used in the CMP system is disclosed. The belt that may be used with the apparatus extends between a first roller and a second roller to define a belt loop with an inner surface and an outer surface to be used for CMP. The apparatus includes a compensating roller that has a first end and a second end where the first end and second end extends a width of the belt. The first end and the second end have a first diameter. The center of the roller has a second diameter that is less than the first diameter. The compensating roller has a symmetrically tapered shape that extends between each of the first end and second end to the center. The compensating roller is positioned inside of the belt loop, and is applied to the inner surface of the belt loop to reduce non-uniform stretch of the belt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.