Projection optical system, manufacturing method thereof, and projection exposure apparatus
US6757051B2 · kind B2 · utility
63Cited by
22References
58Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 19, 2001 |
| Grant date | Jun 29, 2004 |
| Priority date | — |
| Expiry date | Jun 19, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A projection optical system forms an image of an object in a first plane onto a second plane. The projection optical system has an optical element group including at least one refractive member and plural reflective members, and a plurality of lens-barrel units holding the optical element group divided into a plurality of respective groupings. The reflective members are all held by a single lens-barrel unit of the plurality of lens-barrels units.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.