Jin Nishikawa
5Patents
2h-index
6Co-inventors
36Inventor score
Filing activity: Jun 19, 2001 → Nov 18, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6757051B2 | Projection optical system, manufacturing method thereof, and projection exposure apparatus | Physics | 63 | Expired |
| US6791766B2 | Method and device for holding optical member, optical device, exposure apparatus, and device manufacturing method | Physics | 7 | Expired |
| US7719661B2 | Illumination optical apparatus, exposure apparatus, and method for producing device | Physics | 2 | Active |
| US8576375B2 | Optical member-holding apparatus, method for adjusting position of optical member, and exposure apparatus | Physics | 2 | Active |
| US7583361B2 | System for controlling a dual mover assembly for an exposure apparatus | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.