Patent · US Expired

Method of preventing solder wetting in an optical device using diffusion of Cr

US6762119B2 · kind B2 · utility

12Cited by
10References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 20, 2001
Grant dateJul 13, 2004
Priority date
Expiry dateJun 20, 2021

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/0235
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A process and structure for forming an optical subassembly in an integrated circuit, comprising: defining electrically conducting lines and bonding pads in a metallization layer on a substrate; depositing a passivation layer over the metallization layer; etching the passivation layer to remove the passivation layer from each of the bonding pads and a portion of the metallization layer associated with each of the bonding pads; diffusing Cr from the lines proximate said bonding pads to prevent solder wetting down lines; bonding an optical device to one of the bonding pads; and attaching the substrate to a carrier utilizing solder bond attachment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.