Operating a processing tool in a degraded mode upon detecting a fault
US6763278B1 · kind B1 · utility
3Cited by
12References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 26, 2002 |
| Grant date | Jul 13, 2004 |
| Priority date | — |
| Expiry date | Sep 29, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A method and apparatus is provided for operating a processing tool in a degraded mode upon detecting a fault and in accordance with one or more business rules. The method comprises detecting a fault associated with a processing tool capable of processing one or more workpieces and operating the processing tool in a degraded mode in response to detecting the fault.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.