Elfido Coss, Jr.
66Patents
19h-index
37Co-inventors
80Inventor score
Filing activity: Oct 8, 1996 → Jul 2, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6304999A | Method and apparatus for embedded process control framework in tool systems | Emerging Cross-Sectional Technologies | 98 | Expired |
| US6465263B1 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Electricity | 49 | Expired |
| US6725402B1 | Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 46 | Expired |
| US7200779B1 | Fault notification based on a severity level | Physics | 46 | Expired |
| US6594589B1 | Method and apparatus for monitoring tool health | Emerging Cross-Sectional Technologies | 46 | Expired |
| US6831555B1 | Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework | Physics | 44 | Expired |
| US6778873B1 | Identifying a cause of a fault based on a process controller output | Emerging Cross-Sectional Technologies | 43 | Expired |
| US6532555B1 | Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6546508B1 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 39 | Expired |
| US8321048B1 | Associating data with workpieces and correlating the data with yield data | Emerging Cross-Sectional Technologies | 39 | Expired |
| US5838566A | System and method for managing empty carriers in an automated material handling system | Physics | 37 | Expired |
| US6157866A | Automated material handling system for a manufacturing facility divided into separate fabrication areas | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6308107A | Realtime decision making system for reduction of time delays in an automated material handling system | Emerging Cross-Sectional Technologies | 30 | Expired |
| US6431814B1 | Integrated wafer stocker and sorter with integrity verification system | Physics | 27 | Expired |
| US7039495B1 | Management of multiple types of empty carriers in automated material handling systems | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6411859B1 | Flow control in a semiconductor fabrication facility | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6035245A | Automated material handling system method and arrangement | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5924833A | Automated wafer transfer system | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6356804B1 | Automated material handling system method and arrangement | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5904487A | Electrode reshaping in a semiconductor etching device | Electricity | 19 | Expired |
| US6871114B1 | Updating process controller based upon fault detection analysis | Physics | 19 | Expired |
| US6954883B1 | Method and apparatus for performing fault detection using data from a database | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6740534B1 | Determination of a process flow based upon fault detection analysis | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6871112B1 | Method for requesting trace data reports from FDC semiconductor fabrication processes | Electricity | 14 | Expired |
| US6449522B1 | Managing a semiconductor fabrication facility using wafer lot and cassette attributes | Emerging Cross-Sectional Technologies | 14 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.