Inventor · Austin, TX, US

Elfido Coss, Jr.

66Patents
19h-index
37Co-inventors
80Inventor score

Filing activity: Oct 8, 1996 → Jul 2, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US6304999A Method and apparatus for embedded process control framework in tool systems Emerging Cross-Sectional Technologies 98 Expired
US6465263B1 Method and apparatus for implementing corrected species by monitoring specific state parameters Electricity 49 Expired
US6725402B1 Method and apparatus for fault detection of a processing tool and control thereof using an advanced process control (APC) framework Emerging Cross-Sectional Technologies 46 Expired
US7200779B1 Fault notification based on a severity level Physics 46 Expired
US6594589B1 Method and apparatus for monitoring tool health Emerging Cross-Sectional Technologies 46 Expired
US6831555B1 Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework Physics 44 Expired
US6778873B1 Identifying a cause of a fault based on a process controller output Emerging Cross-Sectional Technologies 43 Expired
US6532555B1 Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework Emerging Cross-Sectional Technologies 39 Expired
US6546508B1 Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework Emerging Cross-Sectional Technologies 39 Expired
US8321048B1 Associating data with workpieces and correlating the data with yield data Emerging Cross-Sectional Technologies 39 Expired
US5838566A System and method for managing empty carriers in an automated material handling system Physics 37 Expired
US6157866A Automated material handling system for a manufacturing facility divided into separate fabrication areas Emerging Cross-Sectional Technologies 32 Expired
US6308107A Realtime decision making system for reduction of time delays in an automated material handling system Emerging Cross-Sectional Technologies 30 Expired
US6431814B1 Integrated wafer stocker and sorter with integrity verification system Physics 27 Expired
US7039495B1 Management of multiple types of empty carriers in automated material handling systems Emerging Cross-Sectional Technologies 27 Expired
US6411859B1 Flow control in a semiconductor fabrication facility Emerging Cross-Sectional Technologies 25 Expired
US6035245A Automated material handling system method and arrangement Emerging Cross-Sectional Technologies 23 Expired
US5924833A Automated wafer transfer system Emerging Cross-Sectional Technologies 23 Expired
US6356804B1 Automated material handling system method and arrangement Emerging Cross-Sectional Technologies 23 Expired
US5904487A Electrode reshaping in a semiconductor etching device Electricity 19 Expired
US6871114B1 Updating process controller based upon fault detection analysis Physics 19 Expired
US6954883B1 Method and apparatus for performing fault detection using data from a database Emerging Cross-Sectional Technologies 19 Expired
US6740534B1 Determination of a process flow based upon fault detection analysis Emerging Cross-Sectional Technologies 18 Expired
US6871112B1 Method for requesting trace data reports from FDC semiconductor fabrication processes Electricity 14 Expired
US6449522B1 Managing a semiconductor fabrication facility using wafer lot and cassette attributes Emerging Cross-Sectional Technologies 14 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.