Method of verifying a mask for a mask ROM
US6773937B1 · kind B1 · utility
12Cited by
1References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2003 |
| Grant date | Aug 10, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B20/38
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a method to verify a mask for a mask ROM, a serial of random codes that are exclusive to each other are implanted into a plurality of wafers manufactured by a same process with the mask or a plurality of die regions in a single wafer manufactured by a same process with the mask, and then the test results derived from the implanted wafers or die regions are compared to determine if the mask is defective.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.