Surface inspection method, surface inspection apparatus, and recording medium and data signal for providing surface inspection program
US6774987B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 15, 2003 |
| Grant date | Aug 10, 2004 |
| Priority date | — |
| Expiry date | Sep 15, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A surface inspection method for inspecting a pattern formed at a surface of a test piece, includes: a first step in which a plurality of inspection conditions that are different from each other are set; a second step in which light from the surface of the test piece is detected by irradiating illumination light onto the surface of the test piece under each of the plurality of inspection conditions; a third step in which a plurality of sets of detection information corresponding to the plurality of inspection conditions are generated based upon the detected light; a fourth step in which a logical OR of the plurality of sets of detection information is obtained; and a fifth step in which a decision is made as to whether or not the pattern at the surface of the test piece is acceptable based upon results of the logical OR.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.