Patent · US Expired

Method for manipulating microscopic particles and analyzing

US6777674B2 · kind B2 · utility

13Cited by
8References
65Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 23, 2002
Grant dateAug 17, 2004
Priority date
Expiry dateSep 23, 2022

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2001/028
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

We disclose a method for analyzing the composition of a microscopic particle resting on a first sample surface. The method comprises positioning a micro-manipulator probe near the particle; attaching the particle to the probe; moving the probe and the attached particle away from the first sample surface; positioning the particle on a second sample surface; and, analyzing the composition of the particle on the second sample surface by energy-dispersive X-ray analysis or detection of Auger electrons. The second surface has a reduced or non-interfering background signal during analysis relative to the background signal of the first surface. We also disclose methods for adjusting the electrostatic forces and DC potentials between the probe, the particle, and the sample surfaces to effect removal of the particle, and its transfer and relocation to the second sample surface.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.