Patent · US Expired

Coordinate measuring stage and coordinate measuring instrument

US6778260B2 · kind B2 · utility

4Cited by

11References

18Claims

0Family size

Assignee

Leica Microsystems Semiconductor GmbH · DE

Inventors

Carola Blaesing-Bangert · Kassel, DE
Ulrich Kaczynski · Bad Nauheim, DE

Key dates

Filing date	Aug 20, 2002
Grant date	Aug 17, 2004
Priority date	—
Expiry date	Aug 20, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70616
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A coordinate measuring stage includes a stationary base part having a linear X guidance element, a center part slidable along the linear X guidance element, and an X-Y-positionable stage body for reception of a substrate, the X-Y positionable stage body being movable slidingly alone the Y guidance element. The center part is arranged in freely suspended fashion over the base part and supported at one end on the Y guidance element and with at another end on another support element. The Y guidance element, the other support element, and the stake body are supported, slidably and independently of one another, on the surface of the base part.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.