Nanotube tip for atomic force microscope
US6780664B1 · kind B1 · utility
10Cited by
8References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 20, 2002 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Dec 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/876
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Various microscopy probes and methods of fabricating the same are provided. In one aspect, a method of fabricating a microscopy probe is provided that includes providing a member and forming a first film on the member. The first film fosters growth of carbon nanotubes when exposed to a carbon-containing compound. A second film is formed on the first film. The second film has an opening therein that exposes a portion of the first film. A carbon nanotube is formed on the exposed portion of the first film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.