Universal EUV in-band intensity detector
US6781135B2 · kind B2 · utility
9Cited by
6References
19Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 21, 2002 |
| Grant date | Aug 24, 2004 |
| Priority date | — |
| Expiry date | Nov 21, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG21K1/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Extreme ultraviolet light is detected using a universal in-band detector for detecting extreme ultraviolet radiation that includes: (a) an EUV sensitive photodiode having a diode active area that generates a current responsive to EUV radiation; (b) one or more mirrors that reflects EUV radiation having a defined wavelength(s) to the diode active area; and (c) a mask defining a pinhole that is positioned above the diode active area, wherein EUV radiation passing through the pinhole is restricted substantially to illuminating the diode active area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.