Kurt Berger
8Patents
5h-index
5Co-inventors
56Inventor score
Filing activity: Jan 19, 1978 → Mar 23, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4160504A | Packaging unit for semiconductor discs | Performing Operations; Transporting | 29 | Expired |
| US6781135B2 | Universal EUV in-band intensity detector | Physics | 9 | Expired |
| US6710351B2 | EUV mirror based absolute incident flux detector | Physics | 7 | Expired |
| US6130431A | Monolithic pattern-sensitive detector | Electricity | 5 | Expired |
| US7196771B2 | Reticle stage based linear dosimeter | Physics | 5 | Expired |
| US5004759A | Stabilisation of polyphenylene ethers with macrocyclic polyalkylpiperidine compounds | Chemistry; Metallurgy | 4 | Expired |
| US6906781B2 | Reticle stage based linear dosimeter | Physics | 3 | Expired |
| US5078914A | Resistance paste and resistance layer produced therefrom | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.