Patent · US Expired

Semiconductor memory cell and memory array using a breakdown phenomena in an ultra-thin dielectric

US6798693B2 · kind B2 · utility

46Cited by
66References
9Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 18, 2001
Grant dateSep 28, 2004
Priority date
Expiry dateJan 22, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/0002
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A semiconductor memory cell having a data storage element constructed around an ultra-thin dielectric, such as a gate oxide, is used to store information by stressing the ultra-thin dielectric into breakdown (soft or hard breakdown) to set the leakage current level of the memory cell. The memory cell is read by sensing the current drawn by the cell. A suitable ultra-thin dielectric is high quality gate oxide of about 50 å thickness or less, as commonly available from presently available advanced CMOS logic processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.