Method for producing a self-supporting electron-optical transparent structure, and structure produced in accordance with the method

US6800404B2 · kind B2 · utility

Assignee

• DR. JOHANNES HEIDENHAIN GMBH · DE

Inventors

• Peter Speckbacher · Kirchweidach, DE
• Georg Flatscher · Schneizlreuth, DE
• Michael Allgauer · Traunreut, DE
• Erich Bayer · Trostberg, DE
• Anton Sailer · Traunstein, DE
• Martin Ullrich · Leverkusen, DE

Key dates

• Filing date: Jul 31, 2002
• Grant date: Oct 5, 2004
• Expiry date: Sep 11, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/31794
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A method for producing a self-supporting electron-optical transparent structure that includes multi-layer strips and recesses located between the multi-layer strips. The method includes applying a first layer to a second layer, presetting a pattern by exposing or irradiating the first layer and etching the pattern out of the first layer so that partial areas of the second layer are uncovered. The method further includes galvanically applying layers to the uncovered partial areas of the second layer so that multi-layer strips are formed thereon and an electron-optical transparent structure is formed and removing the electron-optical transparent structure off the second layer.