Method and apparatus for incorporating control simulation environment
US6802045B1 · kind B1 · utility
24Cited by
4References
31Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 19, 2001 |
| Grant date | Oct 5, 2004 |
| Priority date | — |
| Expiry date | Jan 9, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention provides for a method and an apparatus for implementing a control simulation environment into a manufacturing environment. A process task is defined. A process simulation function is performed to produce simulation data corresponding to the process task. The simulation data is integrated with a process control environment for controlling a manufacturing process of a semiconductor device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.