Thomas J. Sonderman
48Patents
17h-index
28Co-inventors
73Inventor score
Filing activity: Oct 25, 1999 → Jan 30, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6387823B1 | Method and apparatus for controlling deposition process using residual gas analysis | Electricity | 269 | Expired |
| US6470230B1 | Supervisory method for determining optimal process targets based on product performance in microelectronic fabrication | Electricity | 73 | Expired |
| US6708075B2 | Method and apparatus for utilizing integrated metrology data as feed-forward data | Electricity | 57 | Expired |
| US6465263B1 | Method and apparatus for implementing corrected species by monitoring specific state parameters | Electricity | 49 | Expired |
| US6818561B1 | Control methodology using optical emission spectroscopy derived data, system for performing same | Electricity | 49 | Expired |
| US6449524B1 | Method and apparatus for using equipment state data for run-to-run control of manufacturing tools | Electricity | 48 | Expired |
| US6751518B1 | Dynamic process state adjustment of a processing tool to reduce non-uniformity | Electricity | 47 | Expired |
| US6284622A | Method for filling trenches | Electricity | 41 | Expired |
| US6917849B1 | Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters | Electricity | 40 | Expired |
| US6546508B1 | Method and apparatus for fault detection of a processing tool in an advanced process control (APC) framework | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6678570B1 | Method and apparatus for determining output characteristics using tool state data | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6650955B1 | Method and apparatus for determining a sampling plan based on process and equipment fingerprinting | Emerging Cross-Sectional Technologies | 27 | Expired |
| US6802045B1 | Method and apparatus for incorporating control simulation environment | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6444481B1 | Method and apparatus for controlling a plating process | Electricity | 20 | Expired |
| US7402257B1 | Plasma state monitoring to control etching processes and across-wafer uniformity, and system for performing same | Electricity | 18 | Expired |
| US6645780B1 | Method and apparatus for combining integrated and offline metrology for process control | Electricity | 18 | Expired |
| US6615098B1 | Method and apparatus for controlling a tool using a baseline control script | Emerging Cross-Sectional Technologies | 17 | Expired |
| US6454899B1 | Apparatus for filling trenches | Electricity | 16 | Expired |
| US6821792B1 | Method and apparatus for determining a sampling plan based on process and equipment state information | Physics | 15 | Expired |
| US7103439B1 | Method and apparatus for initializing tool controllers based on tool event data | Emerging Cross-Sectional Technologies | 14 | Expired |
| US6524774B1 | Method of controlling photoresist thickness based upon photoresist viscosity | Physics | 13 | Expired |
| US8017411B2 | Dynamic adaptive sampling rate for model prediction | Electricity | 12 | Expired |
| US6699727B1 | Method for prioritizing production lots based on grade estimates and output requirements | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6785586B1 | Method and apparatus for adaptively scheduling tool maintenance | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6511898B1 | Method for controlling deposition parameters based on polysilicon grain size feedback | Electricity | 11 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.