Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameterized mathematical model equations for lens retardance, in ellipometry and polarimetry
US6804004B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | May 30, 2000 |
| Grant date | Oct 12, 2004 |
| Priority date | — |
| Expiry date | Aug 28, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/447
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calculating retardance entered to, or between, orthogonal components in a beam of electromagnetic radiation which is caused to pass through input and/or output optical elements and interact with a material system, by each of the input and output optical elements, substantially uncorrelated with retardation entered by the material system. Present invention input and/or output focusing lens(es) find application in spectroscopic ellipsometer mediated investigation of small spots on material systems, wherein a beam of electromagnetic radiation is caused to converge via an input lens, interact with a very small, chromatically undispersed spot area on a material system, then optionally re-collimate via an output lens, prior to entering a detector system. Present invention methodology provides benefit where it is necessary to separate out birefringent effects of input and/or output optical element focusing len…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.