Patent · US Expired

Non-volatile floating gate memory cell with floating gates formed in cavities, and array thereof, and method of formation

US6806531B1 · kind B1 · utility

55Cited by
8References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 7, 2003
Grant dateOct 19, 2004
Priority date
Expiry dateApr 7, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/037
  • WIPO fieldComputer technology
  • WIPO sectorElectrical engineering

Abstract

A non-volatile memory cell has a single crystalline semiconductive material, such as single crystalline silicon, of a first conductivity type. A first and a second region each of a second conductivity type, different from the first conductivity type, spaced apart from one another is formed in the semiconductive material. A channel region, having a first portion, and a second portion, connects the first and second regions for the conduction of charges. A dielectric is on the channel region. A floating gate, which can be conductive or non-conductive, is on the dielectric, spaced apart from the first portion of the channel region. The first portion of the channel region is adjacent to the first region, with the first floating gate having generally a triangular shape. The floating gate is formed in a cavity. A gate electrode is capacitively coupled to the first floating gate, and is spaced apart from the second portion of the channel region. The second portion of the channel region is between the first portion and the second region. A bi-directional non-volatile memory cell has two floating gates each formed in a cavity. A method of making the non-volatile memory cell and the array are…

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.