Method for producing a buried layer of material in another material
US6808967B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 16, 2001 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Apr 16, 2021 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/76245
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The aim of the invention is a method for producing a layer (2) of a first material embedded in a substrate (1) comprising at least one second material. The method comprises the following stages:formation in the substrate (1), at the level of the desired embedded layer, of a layer of microcavities intended to serve as centers of nucleation to produce said first material in said second material,formation of precipitate embryos from the nucleation centers formed, the precipitate embryos corresponding to the first material,growth of the precipitates from the embryos through species concentration corresponding to the first material and carried to the microcavity layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.