Correlating an inline parameter to a device operation parameter
US6810296B2 · kind B2 · utility
22Cited by
16References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 25, 2002 |
| Grant date | Oct 26, 2004 |
| Priority date | — |
| Expiry date | Sep 25, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54453
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method and an apparatus for dynamic targeting for a process control system. Inline parameter data relating to a processed workpiece is received. A determination is made whether the inline parameter would result in a value of a device operation parameter within a predetermined range. At least one process operation performed upon the workpiece is adjusted in response to a determination that the inline parameter would not result in a value of the device operation parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.