Method for fabricating an electrode arrangement for charge storage

US6821861B1 · kind B1 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Matthias Goldbach · Dresden, DE
• Thomas Hecht · Dresden, DE

Key dates

• Filing date: Jul 31, 2003
• Grant date: Nov 23, 2004
• Expiry date: Jul 31, 2023

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10B12/0385

Abstract

The invention relates to an electrode arrangement for charge storage with an external trench electrode (202; 406), embodied along the wall of a trench provided in a substrate (401) and electrically insulated on both sides in the trench by a first and a second dielectric (104; 405, 409); an internal trench electrode (201; 410), serving as counter-electrode to the external trench electrode (201; 406) and insulated by the second dielectric (104; 409) and a substrate electrode (201; 403), which is insulated by the first dielectric (104; 405) outside the trench, which serves as counter-electrode to the external trench electrode (202; 406) and is connected to the internal trench electrode (201; 410) in the upper trench region.