Inventor · Dresden, DE

Thomas Hecht

22Patents
8h-index
23Co-inventors
67Inventor score

Filing activity: Jun 12, 2002 → Feb 15, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7041568B2 Method for the production of a self-adjusted structure on a semiconductor wafer Electricity 197 Expired
US6835417B2 Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes Chemistry; Metallurgy 103 Expired
US7344953B2 Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition Electricity 14 Expired
US7307735B2 Method for determining the depth of a buried structure Physics 13 Expired
US6693016B2 Method of fabricating a trench-structure capacitor device Electricity 11 Expired
US6919255B2 Semiconductor trench structure Electricity 10 Expired
US6953722B2 Method for patterning ceramic layers Electricity 9 Expired
US7132337B2 Charge-trapping memory device and method of production Electricity 8 Expired
US7157371B2 Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devices Electricity 5 Expired
US7297983B2 Method for fabricating an integrated circuit on a semiconductor substrate Electricity 4 Expired
US6674113B2 Trench capacitor and method for manufacturing the same Electricity 4 Expired
US7087485B2 Method of fabricating an oxide collar for a trench capacitor Electricity 3 Expired
US6821861B1 Method for fabricating an electrode arrangement for charge storage Electricity 1 Expired
US7842977B2 Gate electrode structure, MOS field effect transistors and methods of manufacturing the same Electricity 1 Active
US7176514B2 Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material Electricity 1 Expired
US6806037B2 Method for producing and/or renewing an etching mask Electricity 1 Expired
US7531406B2 Method for fabricating an electrical component Electricity 0 Active
US6960524B2 Method for production of a metallic or metal-containing layer Electricity 0 Expired
US7144770B2 Memory cell and method for fabricating it Electricity 0 Expired
US7268037B2 Method for fabricating microchips using metal oxide masks Electricity 0 Expired
US7402860B2 Method for fabricating a capacitor Electricity 0 Expired
US7358187B2 Coating process for patterned substrate surfaces Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.