Thomas Hecht
22Patents
8h-index
23Co-inventors
67Inventor score
Filing activity: Jun 12, 2002 → Feb 15, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7041568B2 | Method for the production of a self-adjusted structure on a semiconductor wafer | Electricity | 197 | Expired |
| US6835417B2 | Method and device for depositing thin layers via ALD/CVD processes in combination with rapid thermal processes | Chemistry; Metallurgy | 103 | Expired |
| US7344953B2 | Process for vertically patterning substrates in semiconductor process technology by means of inconformal deposition | Electricity | 14 | Expired |
| US7307735B2 | Method for determining the depth of a buried structure | Physics | 13 | Expired |
| US6693016B2 | Method of fabricating a trench-structure capacitor device | Electricity | 11 | Expired |
| US6919255B2 | Semiconductor trench structure | Electricity | 10 | Expired |
| US6953722B2 | Method for patterning ceramic layers | Electricity | 9 | Expired |
| US7132337B2 | Charge-trapping memory device and method of production | Electricity | 8 | Expired |
| US7157371B2 | Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devices | Electricity | 5 | Expired |
| US7297983B2 | Method for fabricating an integrated circuit on a semiconductor substrate | Electricity | 4 | Expired |
| US6674113B2 | Trench capacitor and method for manufacturing the same | Electricity | 4 | Expired |
| US7087485B2 | Method of fabricating an oxide collar for a trench capacitor | Electricity | 3 | Expired |
| US6821861B1 | Method for fabricating an electrode arrangement for charge storage | Electricity | 1 | Expired |
| US7842977B2 | Gate electrode structure, MOS field effect transistors and methods of manufacturing the same | Electricity | 1 | Active |
| US7176514B2 | Method and configuration for reinforcement of a dielectric layer at defects by self-aligning and self-limiting electrochemical conversion of a substrate material | Electricity | 1 | Expired |
| US6806037B2 | Method for producing and/or renewing an etching mask | Electricity | 1 | Expired |
| US7531406B2 | Method for fabricating an electrical component | Electricity | 0 | Active |
| US6960524B2 | Method for production of a metallic or metal-containing layer | Electricity | 0 | Expired |
| US7144770B2 | Memory cell and method for fabricating it | Electricity | 0 | Expired |
| US7268037B2 | Method for fabricating microchips using metal oxide masks | Electricity | 0 | Expired |
| US7402860B2 | Method for fabricating a capacitor | Electricity | 0 | Expired |
| US7358187B2 | Coating process for patterned substrate surfaces | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.