Patent · US Expired

Nonvolatile memory cell with low doping region

US6828620B2 · kind B2 · utility

2Cited by
39References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 12, 2003
Grant dateDec 7, 2004
Priority date
Expiry dateMay 14, 2023

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03K19/1778
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

A technique of fabricating a nonvolatile device includes forming a low doping region to aid in the reduction of substrate hot electrons. The nonvolatile device may be a floating gate device, such as a Flash, EEPROM, or EPROM memory cell. The low doping region has a lower doping concentration than that of the substrate. By reducing substrate hot electrons, this improves the reliability and longevity of the nonvolatile device.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.