Inspection system for circuit patterns and a method thereof
US6831998B1 · kind B1 · utility
10Cited by
8References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jun 22, 2000 |
| Grant date | Dec 14, 2004 |
| Priority date | — |
| Expiry date | Oct 17, 2021 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30141
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
In order to provide a high-speed, inexpensive inspection system that has a short development period, that is flexible, and that allow algorithms to be easily changed, a PC equipped with an image input feature is used to capture an image detected by a line image sensor, this detected image is transferred to a plurality of PCs connected by a LAN, and defects are detected using software processing on the plurality of PCs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.