Patent · US Expired

Catadioptric objective

US6836379B2 · kind B2 · utility

1Cited by

4References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Gerhard · Aalen, DE
Hans-Jochen Paul · Aalen, DE

Key dates

Filing date	Apr 8, 2002
Grant date	Dec 28, 2004
Priority date	—
Expiry date	Aug 10, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70225
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A catadioptric objective is provided with a beam splitter surrounded at least partially by a mount, with a mirror, with a plurality of lenses and with a &lgr;/4 plate arranged between the mirror and the beam splitter. Arranged between the beam splitter and the mount on the side on which false light emerges from the beam splitter is an absorption device that absorbs false light traversing the beam splitter

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.