Inventor · Aalen, DE

Hans-Jochen Paul

13Patents
3h-index
30Co-inventors
56Inventor score

Filing activity: Dec 12, 2001 → Sep 6, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US7196842B2 Attenuating filter for ultraviolet light Physics 29 Expired
US6697194B2 Antireflection coating for ultraviolet light at large angles of incidence Physics 7 Expired
US6825976B2 Antireflection coating for ultraviolet light Physics 4 Expired
US6863398B2 Method and coating system for coating substrates for optical components Chemistry; Metallurgy 3 Expired
US8294991B2 Interference systems for microlithgraphic projection exposure systems Physics 2 Active
US7093937B2 Optical component and coating system for coating substrates for optical components Chemistry; Metallurgy 1 Expired
US10474036B2 Optical element and optical arrangement therewith Physics 1 Active
US6836379B2 Catadioptric objective Physics 1 Expired
US9915873B2 Reflective optical element, and optical system of a microlithographic projection exposure apparatus Physics 0 Active
US6967771B2 Antireflection coating for ultraviolet light at large angles of incidence Physics 0 Expired
US9494718B2 Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective Physics 0 Active
US9188771B2 Reflective optical imaging system Physics 0 Active
US9915876B2 EUV mirror and optical system comprising EUV mirror Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.