Apparatus for treating a workpiece with steam and ozone
US6837252B2 · kind B2 · utility
14Cited by
53References
22Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 18, 2003 |
| Grant date | Jan 4, 2005 |
| Priority date | — |
| Expiry date | Apr 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a method for processing a workpiece to remove material from a first surface of the workpiece, steam is introduced onto the first surface under conditions so that at least some of the steam condenses and forms a liquid boundary layer on the first surface. The condensing steam helps to maintain the first surface of the workpiece at an elevated temperature. Ozone is provided around the workpiece under conditions where the ozone diffuses through the boundary layer and reacts with the material on the first surface. The temperature of the first surface is controlled to maintain condensation of the steam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.