Loading and unloading station for semiconductor processing installations

US6837663B2 · kind B2 · utility

Assignee

• Brooks Automation GmbH · US

Inventors

• Andreas Mages · Jena, DE
• Werner Scheler · Jena, DE
• Herbert Blaschitz · Munich, DE
• Alfred Schulz · Oberriexingen, DE
• Heinz Schneider · Düren, DE

Key dates

• Filing date: Jun 12, 2003
• Grant date: Jan 4, 2005
• Expiry date: Jun 12, 2023

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S414/14
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of i…