3-D spiral stacked inductor on semiconductor material
US6841847B2 · kind B2 · utility
34Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2002 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Sep 26, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49165
Abstract
A 3-D spiral stacked inductor is provided having a substrate with a plurality of turns in a plurality of levels wherein the number of levels increases from an inner turn to the outer turn of the inductor. First and second connecting portions are respectively connected to an inner turn and an outermost turn, and dielectric material contains the first and second connecting portions and the plurality of turns over the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.