Patent · US Expired

Catadioptric objective

US6842294B2 · kind B2 · utility

2Cited by

7References

2Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Hubert Holderer · Oberkochen, DE
Ulrich Weber · Ulm, DE
Alexander Kohl · Aalen, DE
Toralf Gruner · Hennef (Sieg), DE
Christoph Zaczek · Heubach, DE
Jens Ullmann · Oberkochen, DE
Martin Weiser · Sinsheim, DE
Bernhard Gellrich · Aalen, DE
Hartmut Muenker · Aalen, DE

Key dates

Filing date	Apr 8, 2002
Grant date	Jan 11, 2005
Priority date	—
Expiry date	Apr 8, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70225
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A catadioptric objective comprises a plurality of lenses and at least two deflecting mirrors that have reflecting surfaces that are at a specific angle, in particular of 90°, to one another. The two deflecting mirrors are arranged with their reflecting surfaces on a common base member whose position in the objective can be set.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.