Broad band DUV, VUV long-working distance catadioptric imaging system
US6842298B1 · kind B1 · utility
51Cited by
37References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 28, 2001 |
| Grant date | Jan 11, 2005 |
| Priority date | — |
| Expiry date | Apr 29, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70225
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A high performance objective having very small central obscuration, an external pupil for apertureing and Fourier filtering, loose manufacturing tolerances, large numerical aperture, long working distance, and a large field of view is presented. The objective is preferably telecentric. The design is ideally suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths in the UV to VUV spectral range.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.