Single proof mass, 3 axis MEMS transducer
US6845670B1 · kind B1 · utility
69Cited by
11References
46Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 2003 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Jul 8, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0831
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer is provided herein which comprises an unbalanced proof mass (51), and which is adapted to sense acceleration in at least two mutually orthogonal directions. The proof mass (51) has first (65) and second (67) opposing sides that are of unequal mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.