Method and device for controlling fluid flow in an optical assembly
US6847431B2 · kind B2 · utility
1Cited by
8References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2003 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Mar 10, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical assembly (222) for directing and/or focusing a beam of light energy for an exposure apparatus (10) includes an optical housing (240) and one or more optical elements (242) that cooperate to form an optical cavity (270) having one or more stagnant flow areas (272). The optical assembly (222) also includes one or more flow diverters (246) for improving the flow a replacement fluid (250) in the stagnant flow areas (272) of the optical cavity (270) during purging of the optical assembly (222) with the replacement fluid (250).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.