Electrostatic chuck for preventing an arc
US6847516B2 · kind B2 · utility
12Cited by
4References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 4, 2002 |
| Grant date | Jan 25, 2005 |
| Priority date | — |
| Expiry date | Nov 19, 2022 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electrostatic chuck includes: a metal plate; a dielectric layer on the metal plate, the dielectric layer and the metal plate having a lift pin hole and an injection hole of a cooling gas; a lift pin moving up-and-down through the lift pin hole; first protection insulator on an inner surface of the lift pin hole; and second protection insulator on an inner surface of the injection hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.