Sung-Weon Lee
5Patents
3h-index
8Co-inventors
39Inventor score
Filing activity: Feb 27, 2001 → Sep 4, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6770836B2 | Impedance matching circuit for inductively coupled plasma source | Electricity | 20 | Expired |
| US6530993B2 | Cluster tool for fabricating semiconductor device | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6847516B2 | Electrostatic chuck for preventing an arc | Electricity | 12 | Expired |
| US6653988B2 | Parallel resonance whirl antenna | Electricity | 3 | Expired |
| US6685800B2 | Apparatus for generating inductively coupled plasma | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.