Multi-chamber carrier head with a flexible membrane
US6857945B1 · kind B1 · utility
69Cited by
39References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2000 |
| Grant date | Feb 22, 2005 |
| Priority date | — |
| Expiry date | Nov 13, 2020 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B49/16
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A carrier head that has a base assembly and a flexible membrane. The flexible membrane has a generally circular main portion with a lower surface that provides a substrate-mounting surface and a plurality of concentric annular portions extending from the main portion and secured to the base assembly. The volume between the base assembly and the flexible membrane forming a plurality of pressurizable chambers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.