Patent · US Expired

Guarded tub enclosure

US6861856B2 · kind B2 · utility

55Cited by

15References

21Claims

0Family size

Assignee

Cascade Microtech, Inc. · US

Inventors

John Dunklee · Tigard, US
Greg Norgden · Logan, US
C. Eugene Cowan · Beaverton, US

Key dates

Filing date	Dec 13, 2002
Grant date	Mar 1, 2005
Priority date	—
Expiry date	Dec 13, 2022

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/2865
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe station with an improved guarding structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.