Coating film forming method and coating film forming apparatus
US6869640B2 · kind B2 · utility
21Cited by
6References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2002 |
| Grant date | Mar 22, 2005 |
| Priority date | — |
| Expiry date | Jan 3, 2023 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D3/104
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A coating film is formed by the steps of supplying a mixture of a solvent for dissolving a coating liquid and a volatilization suppressing substance for suppressing the volatilization of the solvent onto the surface of the target substrate W, expanding the mixture onto the entire surface of the target substrate W, and supplying a coating liquid onto substantially the central portion of the target substrate W that has received the mixture while rotating the target substrate W thereby expanding the coating liquid outward in the radial direction of the target substrate W thereby forming a coating film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.