Kousuke Yoshihara
95Patents
10h-index
88Co-inventors
81Inventor score
Filing activity: Oct 10, 2000 → Oct 31, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9741559B2 | Film forming method, computer storage medium, and film forming system | Electricity | 449 | Active |
| US6848625B2 | Process liquid supply mechanism and process liquid supply method | Electricity | 28 | Expired |
| US6527860B1 | Substrate processing apparatus | Electricity | 28 | Expired |
| US6869640B2 | Coating film forming method and coating film forming apparatus | Performing Operations; Transporting | 21 | Expired |
| US6811962B2 | Method for developing processing and apparatus for supplying developing solution | Physics | 19 | Expired |
| US6578772B2 | Treatment solution supply apparatus and treatment solution supply method | Electricity | 18 | Expired |
| US6709174B2 | Apparatus and method for development | Performing Operations; Transporting | 16 | Expired |
| US6673151B2 | Substrate processing apparatus | Electricity | 16 | Expired |
| US7802536B2 | Apparatus and method of forming an applied film | Electricity | 11 | Active |
| US8337104B2 | Developing apparatus, developing method and storage medium | Physics | 10 | Active |
| US8480319B2 | Coating and developing apparatus, coating and developing method and non-transitory tangible medium | Electricity | 9 | Active |
| US7901514B2 | Substrate cleaning method and developing apparatus | Emerging Cross-Sectional Technologies | 7 | Active |
| US8043657B2 | Coating treatment method | Physics | 6 | Active |
| US9162247B2 | Coating and development treatment system with airflow control including control unit and movable airflow control plate | Emerging Cross-Sectional Technologies | 6 | Active |
| US7820243B2 | Resist coating method and resist coating apparatus | Physics | 6 | Active |
| US7604013B2 | Substrate cleaning method and developing apparatus | Emerging Cross-Sectional Technologies | 5 | Active |
| US8304018B2 | Coating method | Electricity | 5 | Active |
| US9307653B2 | Substrate cleaning method, substrate cleaning apparatus and storage medium for cleaning substrate | Electricity | 5 | Active |
| US8333522B2 | Developing apparatus, developing method and storage medium | Physics | 5 | Active |
| US8287954B2 | Apparatus and method of forming an applied film | Electricity | 5 | Active |
| US10068763B2 | Coating film forming method, coating film forming apparatus, and storage medium | Electricity | 5 | Active |
| US8216389B2 | Substrate cleaning method and substrate cleaning apparatus | Electricity | 4 | Active |
| US7601933B2 | Heat processing apparatus and heat processing method | Electricity | 4 | Expired |
| US8414972B2 | Coating treatment method, coating treatment apparatus, and computer-readable storage medium | Electricity | 4 | Active |
| US7208066B2 | Substrate processing apparatus and substrate processing method | Electricity | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.