Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device
US6872956B2 · kind B2 · utility
7Cited by
7References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 6, 2003 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Feb 6, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2605
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A cascade type pump arrangement for a particle beam device has first and second turbomolecular pumps, wherein an outlet of the second turbomolecular pump is forepumped by an intermediate pressure region situated between a main pump port and an outlet of the first turbomolecular pump. The particle beam device has a particle beam source operated in ultra high vacuum and a specimen chamber operated at pressures from high vacuum at least up to 1 hPa.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.