Vibration control utilizing signal detrending
US6872961B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 29, 2002 |
| Grant date | Mar 29, 2005 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/53174
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A motion control system for reducing vibration in moving components. The system includes a position control drive and a vibration control drive. At least one position sensor is used to provide feedback signals which are in turn used to provide control signals for both the position control drive and the vibration control drive. In a preferred embodiment the motion control system is applied to a stage of an integrated circuit lithography step and scan machine. The position control drives are linear magnetic actuators and the vibration control drives are electroceramic actuators. A laser interferometer position monitoring system is used to measure the position, speed, and acceleration of the stage system. Actuators apply controlled forces (based on measurements from the position monitoring system) to each stage to control the motion of the stage. Signals from the interferometer position system are also used to control vibration. A recursive least squares (RLS) method is used to identify the commanded motion from the laser interferometer signals. Vibration measurements are derived from the laser interferometer signals by removing the commanded motion portion of the signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.