Robert N. Jacques
32Patents
11h-index
55Co-inventors
74Inventor score
Filing activity: Jan 27, 2000 → Jan 10, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7164144B2 | EUV light source | Physics | 79 | Expired |
| US6690704B2 | Control system for a two chamber gas discharge laser | Electricity | 70 | Expired |
| US7087914B2 | High repetition rate laser produced plasma EUV light source | Electricity | 69 | Expired |
| US6853653B2 | Laser spectral engineering for lithographic process | Electricity | 44 | Expired |
| US6532247B2 | Laser wavelength control unit with piezoelectric driver | Electricity | 41 | Expired |
| US6598322B2 | Shoe with quick tightening upper | Human Necessities | 32 | Expired |
| US7039086B2 | Control system for a two chamber gas discharge laser | Electricity | 16 | Expired |
| US7822084B2 | Method and apparatus for stabilizing and tuning the bandwidth of laser light | Electricity | 16 | Active |
| US7382815B2 | Laser spectral engineering for lithographic process | Electricity | 13 | Expired |
| US7741639B2 | Multi-chambered excimer or molecular fluorine gas discharge laser fluorine injection control | Electricity | 11 | Active |
| US7079564B2 | Control system for a two chamber gas discharge laser | Electricity | 11 | Expired |
| US6650666B2 | Laser wavelength control unit with piezoelectric driver | Electricity | 10 | Expired |
| US7158840B2 | Tuning control parameters of vibration reduction and motion control systems for fabrication equipment and robotic systems | Physics | 10 | Expired |
| US7835414B2 | Laser gas injection system | Electricity | 8 | Active |
| US6454303B2 | Method and apparatus for vibration control | Performing Operations; Transporting | 7 | Expired |
| US6959484B1 | System for vibration control | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7830934B2 | Multi-chamber gas discharge laser bandwidth control through discharge timing | Electricity | 5 | Active |
| US8098698B2 | Active spectral control of DUV laser light source | Electricity | 4 | Active |
| US7852889B2 | Active spectral control of DUV light source | Electricity | 3 | Active |
| US7298770B2 | Laser spectral engineering for lithographic process | Electricity | 3 | Expired |
| US8872123B2 | Method of timing laser beam pulses to regulate extreme ultraviolet light dosing | Electricity | 3 | Active |
| US6872961B2 | Vibration control utilizing signal detrending | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7596164B2 | Control system for a two chamber gas discharge laser | Electricity | 3 | Active |
| US8102889B2 | Multi-chamber gas discharge laser bandwidth control through discharge timing | Electricity | 3 | Active |
| US7830942B2 | Ultraviolet laser light source pulse energy control system | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.