Cleaning agent and cleaning method
US6875288B2 · kind B2 · utility
3Cited by
27References
18Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Oct 9, 2001 |
| Grant date | Apr 5, 2005 |
| Priority date | — |
| Expiry date | Oct 9, 2021 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D2111/44
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The cleaning agent described above comprises a surfactant and an organic solvent, and the cleaning method described above is characterized by allowing the cleaning agent described above to flow on the surface of the material to be treated at a high speed to thereby clean the above surface. According to the present invention, deposits adhering firmly to a surface of a material to be treated can readily be removed without damaging the material to be treated.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.