Micro-electro-mechanical RF switch

US6876282B2 · kind B2 · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Panayotis Andricacos · Ossining, US
• L. Paivikki Buchwalter · Hopewell Junction, US
• Hariklia Deligianni · Alpine, US
• Robert A. Groves · Highland, US
• Christopher V. Jahnes · Upper Saddle River, US
• Jennifer Lund · Brookeville, US
• Michael Meixner · Haslach im Kinzigtal, DE
• David E. Seeger · Congers, US
• Timothy D. Sullivan · Batavia, US
• Ping-Chuan Wang · Hopewell Junction, US

Key dates

• Filing date: May 17, 2002
• Grant date: Apr 5, 2005
• Expiry date: May 17, 2022

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01H2001/0078
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A microelectromechanical switch including: at least one pair of actuator electrodes; at least one input electrode and at least one output electrode for input and output, respectively, of a radio frequency signal; and a beam movable by an attraction between the at least one pair of actuator electrodes, the movable beam having at least a portion electrically connected to the at least one input electrode and to the at least one output electrode when moved by the attraction between the at least one pair of actuator electrodes to make an electrical connection between the at least one input and output electrodes; wherein the at least one pair of actuator electrodes are electrically isolated from each of the at least one input and output electrodes. The microelectromechanical switch can be configured in single or multiple-poles and/or single or multiple throws.