Indexing rotatable chuck for a probe station
US6885197B2 · kind B2 · utility
47Cited by
28References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 28, 2004 |
| Grant date | Apr 26, 2005 |
| Priority date | — |
| Expiry date | May 28, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67271
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A rotary chuck with indexed rotation promotes rapid rotation of a device under test and increases the productivity of a probe station on which the device is being tested. A device mounting member of a rotatable chuck is supported for rotation on a first surface of a base until a vacuum is applied drawing the device mounting member into contact with a second surface of the base and constraining the device mounting member against rotation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.